Surface nanopatterning of hard and soft thin films by a replica-molding approach

In this work, we report on our recent results obtained by a replica-molding approach for large-scale surface nanopatterning. Two materials with quite different mechanical properties have been naopatterned, namely: titanium nitride (TiN) films deposited by reactive sputtering and polystyrene films de...

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Detalles Bibliográficos
Autores principales: Vázquez, Luis, Auger, M. A., Azzaroni, Omar, Schilardi, Patricia Laura, Gago, R., Fonticelli, Mariano Hernán, Sánchez, O., Salvarezza, Roberto Carlos, Albella, J. M.
Formato: Objeto de conferencia Resumen
Lenguaje:Inglés
Publicado: 2004
Materias:
Física
Nanotecnología
Acceso en línea:http://sedici.unlp.edu.ar/handle/10915/123986
Aporte de:
SEDICI (UNLP) de Universidad Nacional de La Plata
id I19-R120-10915-123986
record_format dspace
institution Universidad Nacional de La Plata
institution_str I-19
repository_str R-120
collection SEDICI (UNLP)
language Inglés
topic Física
Nanotecnología
spellingShingle Física
Nanotecnología
Vázquez, Luis
Auger, M. A.
Azzaroni, Omar
Schilardi, Patricia Laura
Gago, R.
Fonticelli, Mariano Hernán
Sánchez, O.
Salvarezza, Roberto Carlos
Albella, J. M.
Surface nanopatterning of hard and soft thin films by a replica-molding approach
topic_facet Física
Nanotecnología
description In this work, we report on our recent results obtained by a replica-molding approach for large-scale surface nanopatterning. Two materials with quite different mechanical properties have been naopatterned, namely: titanium nitride (TiN) films deposited by reactive sputtering and polystyrene films deposited by the casting procedure. In order to explore the capabilities of this strategy we have used in both cases as master surfaces to be replicated silicon surfaces previously nanostructured by low-energy ion-beam sputtering. The original template pattern was formed by an array of silicon lenticular nanodots, 6 nm of average height and 40-50 nm of lateral size, displaying short-range hexagonal order.
format Objeto de conferencia
Resumen
author Vázquez, Luis
Auger, M. A.
Azzaroni, Omar
Schilardi, Patricia Laura
Gago, R.
Fonticelli, Mariano Hernán
Sánchez, O.
Salvarezza, Roberto Carlos
Albella, J. M.
author_facet Vázquez, Luis
Auger, M. A.
Azzaroni, Omar
Schilardi, Patricia Laura
Gago, R.
Fonticelli, Mariano Hernán
Sánchez, O.
Salvarezza, Roberto Carlos
Albella, J. M.
author_sort Vázquez, Luis
title Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_short Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_full Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_fullStr Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_full_unstemmed Surface nanopatterning of hard and soft thin films by a replica-molding approach
title_sort surface nanopatterning of hard and soft thin films by a replica-molding approach
publishDate 2004
url http://sedici.unlp.edu.ar/handle/10915/123986
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