|
|
|
|
| LEADER |
01147cam#a2200313#a#4500 |
| 001 |
BCCAB000680 |
| 008 |
961204m19971997waua#####b####001#0#eng## |
| 005 |
20101130155919.0 |
| 003 |
AR-BCCAB |
| 245 |
0 |
0 |
|a Handbook of microlithography, micromachining, and microfabrication /
|c P. Rai-Choudhury, editor.
|
| 260 |
# |
# |
|a Bellingham, Wash., USA :
|b SPIE Optical Engineering Press,
|c c1997.
|
| 300 |
# |
# |
|a 2 v. :
|b il. ;
|c 26 cm.
|
| 505 |
0 |
# |
|a v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
|
| 504 |
# |
# |
|a Incluye referencias bibliográficas e índice.
|
| 490 |
0 |
# |
|a IEE materials and devices series ;
|v 12A-12B
|
| 590 |
# |
# |
|a La biblioteca posee: v. 1.
|
| 020 |
# |
# |
|a 0819423785 (v. 1)
|
| 700 |
1 |
# |
|a Rai-Choudhury, P.
|4 edt
|
| 246 |
3 |
0 |
|a Microlithography, micromachining, and microfabrication
|
| 080 |
# |
# |
|a 621.38
|
| 650 |
# |
0 |
|a Microlithography.
|
| 650 |
# |
0 |
|a Micromachining.
|
| 650 |
# |
0 |
|a Microfabrication.
|
| 010 |
# |
# |
|a ###96040237#
|
| 050 |
0 |
0 |
|a TK7836
|b .H3423 1997
|
| 040 |
# |
# |
|a DLC
|c DLC
|d DLC
|b spa
|d arbccab
|
| 082 |
0 |
0 |
|a 670
|2 21
|
| 942 |
# |
# |
|c BK
|
| 952 |
# |
# |
|2 udc
|a ARBCCAB
|b ARBCCAB
|d 19980528
|g U$S110.00
|i 16383
|o 621.38 R13
|p 16383
|t 1
|y BK
|