Materias dentro de su búsqueda.
Materias dentro de su búsqueda.
Extreme ultraviolet lasers
10
Extreme ultraviolet lithography
8
Interferometric lithography
8
Interferometry
8
Photoresists
8
Hydrogen silsesquioxane
6
Laboratory environment
6
NanoPatterning
6
Nanopatterning
6
Polymethyl methacrylates
6
Ultraviolet lasers
6
Capillary discharge lasers
4
EUV lasers
4
Electron beam lithography
4
Full width half maximum
4
Nanotechnology
4
Photoresist
4
Compact EUV lasers
2
Extreme Ultraviolet
2
Extreme ultraviolet (EUV) lasers
2
Fresnell zone plate (FZP) lens
2
High brightness
2
High resolution electron microscopy
2
Lithography
2
Nanoscale patterning
2
Optical tables
2
Semiconductor quantum dots
2
Silicon wafers
2
Spatial and temporal coherence
2
Tabletop lasers
2
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1Materias: “...Extreme ultraviolet lasers...”
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2por Marconi, M.C., Wachulak, P.W., Capeluto, M.G., Vaschenko, G., Bravo, H., Menoni, C.S., Rocca, J., Anderson, E.H., Chao, W., Attwood, D., Hemberg, O., Frazer, B., Bloom, S.Materias: “...Extreme ultraviolet lasers...”
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3Publicado 2007Materias: “...Extreme ultraviolet lasers...”
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4Materias: “...Extreme ultraviolet lasers...”
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5Materias: “...Extreme ultraviolet lasers...”
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6por Wachulak, P.W., Urbanski, L., Capeluto, M.G., Hill, D., Rockward, W.S., Iemmi, C., Anderson, E.H., Menoni, C.S., Rocca, J.J., Marconi, M.C.Materias: “...Extreme ultraviolet lasers...”
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7Materias: “...Extreme ultraviolet lasers...”
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8Materias: “...Extreme ultraviolet lasers...”
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9Materias: “...Extreme ultraviolet lasers...”
Artículo publishedVersion -
10Materias: “...Extreme ultraviolet lasers...”
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