Materias dentro de su búsqueda.
Materias dentro de su búsqueda.
Interferometric lithography
11
Interferometry
11
Nanopatterning
7
Polymethyl methacrylates
7
Extreme ultraviolet lasers
6
Photoresists
6
EUV lasers
5
Extreme ultraviolet lithography
5
Nanotechnology
5
Ultraviolet lasers
5
Hydrogen silsesquioxane
4
Laboratory environment
4
Lithography
4
NanoPatterning
4
Ultraviolet radiation
4
Capillary discharge lasers
3
Electron beam lithography
3
Extreme Ultraviolet
3
Full width half maximum
3
Lasers
3
Photoresist
3
Different geometry
2
Exposure dose
2
Laser lithography
2
Multiple exposure
2
Nanodots
2
Sub-100 nm
2
Wavelength lasers
2
Annual meetings
1
Compact EUV lasers
1
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1por Capeluto, M.G., Vaschenko, G., Grisham, M.E., Marconi, M.C., Menoni, C.S., Rocca, J.J., Ludueña, S., Pietrasanta, L., Marcano O. A., Paz J.L.Materias: “...Laser applications...”
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2por Capeluto, M.G., Wachulak, P., Marconi, M.C., Patel, D., Menoni, C.S., Rocca, J.J., Iemmi, C., Anderson, E.H., Chao, W., Attwood, D.T.Materias: “...EUV lasers...”
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3por Capeluto, M.G., Vaschenko, G., Grisham, M., Marconi, M.C., Ludueña, S., Pietrasanta, L., Lu, Y., Parkinson, B., Menoni, C.S., Rocca, J.J.Materias: “...X-ray lasers...”
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4por Wachulak, P.W., Urbanski, L., Capeluto, M.G., Hill, D., Rockward, W.S., Iemmi, C., Anderson, E.H., Menoni, C.S., Rocca, J.J., Marconi, M.C.Materias: “...Extreme ultraviolet (EUV) lasers...”
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5Materias: “...EUV lasers...”
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6Materias: “...EUV lasers...”
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7Materias: “...EUV lasers...”
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8Materias: “...Laser lithography...”
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9Materias: “...Laser lithography...”
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10Materias: “...Soft X-ray lasers...”
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11Materias: “...Lasers...”
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12por Marconi, M.C., Wachulak, P.W., Capeluto, M.G., Vaschenko, G., Bravo, H., Menoni, C.S., Rocca, J., Anderson, E.H., Chao, W., Attwood, D., Hemberg, O., Frazer, B., Bloom, S.Materias: “...Extreme ultraviolet lasers...”
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13Materias: “...Extreme ultraviolet lasers...”
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