Materias dentro de su búsqueda.
Materias dentro de su búsqueda.
Photoresists
Extreme ultraviolet lasers
5
Extreme ultraviolet lithography
5
Interferometric lithography
5
Interferometry
5
Hydrogen silsesquioxane
4
Nanopatterning
4
Polymethyl methacrylates
4
Capillary discharge lasers
3
EUV lasers
3
Electron beam lithography
3
Full width half maximum
3
Laboratory environment
3
NanoPatterning
3
Nanotechnology
3
Photoresist
3
Ultraviolet lasers
3
Fresnell zone plate (FZP) lens
1
High resolution electron microscopy
1
Lithography
1
Mirrors
1
Nanodots
1
Nanoholes
1
Nanoscale patterning
1
Semiconductor quantum dots
1
Silicon wafers
1
Soft X-ray lasers
1
Ultraviolet radiation
1
X ray lasers
1
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1Materias: “...EUV lasers...”
Artículo publishedVersion -
2Materias: “...EUV lasers...”
Artículo publishedVersion -
3Materias: “...EUV lasers...”
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4Materias: “...Soft X-ray lasers...”
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5por Marconi, M.C., Wachulak, P.W., Capeluto, M.G., Vaschenko, G., Bravo, H., Menoni, C.S., Rocca, J., Anderson, E.H., Chao, W., Attwood, D., Hemberg, O., Frazer, B., Bloom, S.Materias: “...Extreme ultraviolet lasers...”
CONF -
6Materias: “...Extreme ultraviolet lasers...”
JOUR