Materias dentro de su búsqueda.
Materias dentro de su búsqueda.
Interferometric lithography
10
Interferometry
10
Extreme ultraviolet lithography
8
EUV lasers
6
Nanopatterning
6
Polymethyl methacrylates
6
Extreme ultraviolet lasers
5
Photoresists
5
Extreme Ultraviolet
4
Extreme ultraviolets
4
Lithography
4
Nanotechnology
4
Ultraviolet lasers
4
Ultraviolet radiation
4
High-precision
3
Hydrogen silsesquioxane
3
Interferometers
3
Laboratory environment
3
Lasers
3
NanoPatterning
3
Phase shift
3
Phase-shift interferometer
3
Phase-shifting interferometers
3
Pulsed lasers
3
Table-top
3
Ar-laser
2
Argon lasers
2
Capillary discharge lasers
2
Different geometry
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Electron beam lithography
2
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1por Capeluto, M.G., Vaschenko, G., Grisham, M.E., Marconi, M.C., Menoni, C.S., Rocca, J.J., Ludueña, S., Pietrasanta, L., Marcano O. A., Paz J.L.Materias: “...Laser applications...”
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2por Capeluto, M.G., Wachulak, P., Marconi, M.C., Patel, D., Menoni, C.S., Rocca, J.J., Iemmi, C., Anderson, E.H., Chao, W., Attwood, D.T.Materias: “...EUV lasers...”
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3por Capeluto, M.G., Vaschenko, G., Grisham, M., Marconi, M.C., Ludueña, S., Pietrasanta, L., Lu, Y., Parkinson, B., Menoni, C.S., Rocca, J.J.Materias: “...X-ray lasers...”
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4por Wachulak, P.W., Urbanski, L., Capeluto, M.G., Hill, D., Rockward, W.S., Iemmi, C., Anderson, E.H., Menoni, C.S., Rocca, J.J., Marconi, M.C.Materias: “...Extreme ultraviolet (EUV) lasers...”
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5Materias: “...Argon lasers...”
Documento de conferencia publishedVersion -
6Materias: “...Argon lasers...”
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7Materias: “...EUV lasers...”
Artículo publishedVersion -
8Materias: “...EUV lasers...”
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9Materias: “...Laser lithography...”
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10Materias: “...Laser lithography...”
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11Materias: “...Soft X-ray lasers...”
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12Materias: “...Lasers...”
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13por Hollinger, R., Bargsten, C., Shlyaptsev, V.N., Kaymak, V., Pukhov, A., Capeluto, M.G., Wang, S., Rockwood, A., Wang, Y., Townsend, A., Prieto, A., Stockton, P., Curtis, A., Rocca, J.J.Materias: “...Ultrafast lasers...”
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14por Marconi, M.C., Wachulak, P.W., Capeluto, M.G., Vaschenko, G., Bravo, H., Menoni, C.S., Rocca, J., Anderson, E.H., Chao, W., Attwood, D., Hemberg, O., Frazer, B., Bloom, S.Materias: “...Extreme ultraviolet lasers...”
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15Materias: “...Extreme ultraviolet lasers...”
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16Materias: “...Pulsed lasers...”
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