Polarization conversion from highly conducting, asymmetric trapezoidal gratings

The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nonde...

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Detalles Bibliográficos
Autores principales: Depine, R.A., Inchaussandague, M.E.
Formato: JOUR
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Acceso en línea:http://hdl.handle.net/20.500.12110/paper_1559128X_v42_n19_p3742_Depine
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