Polarization conversion from highly conducting, asymmetric trapezoidal gratings

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The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nonde...

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Autores principales: Depine, R.A., Inchaussandague, M.E.
Formato: JOUR
Materias:
Conductive materials
Light polarization
Light reflection
Nondestructive examination
Polarization conversion
Diffraction gratings
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_1559128X_v42_n19_p3742_Depine
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Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id todo:paper_1559128X_v42_n19_p3742_Depine
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spelling todo:paper_1559128X_v42_n19_p3742_Depine2023-10-03T16:26:04Z Polarization conversion from highly conducting, asymmetric trapezoidal gratings Depine, R.A. Inchaussandague, M.E. Conductive materials Light polarization Light reflection Nondestructive examination Polarization conversion Diffraction gratings The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p→s and s→p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique. © 2003 Optical Society of America. Fil:Depine, R.A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Inchaussandague, M.E. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. JOUR info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_1559128X_v42_n19_p3742_Depine
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic Conductive materials
Light polarization
Light reflection
Nondestructive examination
Polarization conversion
Diffraction gratings
spellingShingle Conductive materials
Light polarization
Light reflection
Nondestructive examination
Polarization conversion
Diffraction gratings
Depine, R.A.
Inchaussandague, M.E.
Polarization conversion from highly conducting, asymmetric trapezoidal gratings
topic_facet Conductive materials
Light polarization
Light reflection
Nondestructive examination
Polarization conversion
Diffraction gratings
description The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p→s and s→p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique. © 2003 Optical Society of America.
format JOUR
author Depine, R.A.
Inchaussandague, M.E.
author_facet Depine, R.A.
Inchaussandague, M.E.
author_sort Depine, R.A.
title Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_short Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_full Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_fullStr Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_full_unstemmed Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_sort polarization conversion from highly conducting, asymmetric trapezoidal gratings
url http://hdl.handle.net/20.500.12110/paper_1559128X_v42_n19_p3742_Depine
work_keys_str_mv AT depinera polarizationconversionfromhighlyconductingasymmetrictrapezoidalgratings
AT inchaussandagueme polarizationconversionfromhighlyconductingasymmetrictrapezoidalgratings
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