X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition
TiO 2 thin films deposited by a vacuum arc on a glass substrate were characterized by X-ray reflectivity (XRR), X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Several thin films with different amounts of deposited TiO 2 mass and different deposition an...
Guardado en:
| Autores principales: | , , , |
|---|---|
| Formato: | JOUR |
| Materias: | |
| Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_15334880_v14_n5_p3902_Kleiman |
| Aporte de: |
| id |
todo:paper_15334880_v14_n5_p3902_Kleiman |
|---|---|
| record_format |
dspace |
| spelling |
todo:paper_15334880_v14_n5_p3902_Kleiman2023-10-03T16:21:32Z X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition Kleiman, A. Lamas, D.G. Craievich, A.F. Márquez, A. Cathodic Arc Deposition Thin Films X-Ray Reflectivity Atomic force microscopy Imaging techniques Oxide minerals Scanning electron microscopy Substrates Thin films Titanium dioxide Vacuum applications X ray diffraction Annealing temperatures Cathodic arc deposition Oscillatory behaviors Qualitative analysis TiO Titanium dioxide thin film X ray reflectivity X-ray reflectivity analysis Deposition TiO 2 thin films deposited by a vacuum arc on a glass substrate were characterized by X-ray reflectivity (XRR), X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Several thin films with different amounts of deposited TiO 2 mass and different deposition and annealing temperatures were studied. A qualitative analysis of the XRD patterns indicated the presence of the anatase and/or rutile crystalline phases in most of the studied samples. From the analysis of the experimental XRR curves - which exhibited a wide angular range of oscillatory behavior - the thickness, mass density and interface roughness were determined. All XRR patterns were well fitted by modeled curves that assume the presence of a single and homogeneous TiO 2 layer over which a very thin H 2 O layer is adsorbed. The thickest H 2 O adsorption layers were developed in films with the highest anatase content. Our overall results of the XRR analyses are consistent with those derived from the imaging techniques (SEM and AFM). Copyright © 2014 American Scientific Publishers. JOUR info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_15334880_v14_n5_p3902_Kleiman |
| institution |
Universidad de Buenos Aires |
| institution_str |
I-28 |
| repository_str |
R-134 |
| collection |
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) |
| topic |
Cathodic Arc Deposition Thin Films X-Ray Reflectivity Atomic force microscopy Imaging techniques Oxide minerals Scanning electron microscopy Substrates Thin films Titanium dioxide Vacuum applications X ray diffraction Annealing temperatures Cathodic arc deposition Oscillatory behaviors Qualitative analysis TiO Titanium dioxide thin film X ray reflectivity X-ray reflectivity analysis Deposition |
| spellingShingle |
Cathodic Arc Deposition Thin Films X-Ray Reflectivity Atomic force microscopy Imaging techniques Oxide minerals Scanning electron microscopy Substrates Thin films Titanium dioxide Vacuum applications X ray diffraction Annealing temperatures Cathodic arc deposition Oscillatory behaviors Qualitative analysis TiO Titanium dioxide thin film X ray reflectivity X-ray reflectivity analysis Deposition Kleiman, A. Lamas, D.G. Craievich, A.F. Márquez, A. X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition |
| topic_facet |
Cathodic Arc Deposition Thin Films X-Ray Reflectivity Atomic force microscopy Imaging techniques Oxide minerals Scanning electron microscopy Substrates Thin films Titanium dioxide Vacuum applications X ray diffraction Annealing temperatures Cathodic arc deposition Oscillatory behaviors Qualitative analysis TiO Titanium dioxide thin film X ray reflectivity X-ray reflectivity analysis Deposition |
| description |
TiO 2 thin films deposited by a vacuum arc on a glass substrate were characterized by X-ray reflectivity (XRR), X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Several thin films with different amounts of deposited TiO 2 mass and different deposition and annealing temperatures were studied. A qualitative analysis of the XRD patterns indicated the presence of the anatase and/or rutile crystalline phases in most of the studied samples. From the analysis of the experimental XRR curves - which exhibited a wide angular range of oscillatory behavior - the thickness, mass density and interface roughness were determined. All XRR patterns were well fitted by modeled curves that assume the presence of a single and homogeneous TiO 2 layer over which a very thin H 2 O layer is adsorbed. The thickest H 2 O adsorption layers were developed in films with the highest anatase content. Our overall results of the XRR analyses are consistent with those derived from the imaging techniques (SEM and AFM). Copyright © 2014 American Scientific Publishers. |
| format |
JOUR |
| author |
Kleiman, A. Lamas, D.G. Craievich, A.F. Márquez, A. |
| author_facet |
Kleiman, A. Lamas, D.G. Craievich, A.F. Márquez, A. |
| author_sort |
Kleiman, A. |
| title |
X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition |
| title_short |
X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition |
| title_full |
X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition |
| title_fullStr |
X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition |
| title_full_unstemmed |
X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition |
| title_sort |
x-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition |
| url |
http://hdl.handle.net/20.500.12110/paper_15334880_v14_n5_p3902_Kleiman |
| work_keys_str_mv |
AT kleimana xrayreflectivityanalysisoftitaniumdioxidethinfilmsgrownbycathodicarcdeposition AT lamasdg xrayreflectivityanalysisoftitaniumdioxidethinfilmsgrownbycathodicarcdeposition AT craievichaf xrayreflectivityanalysisoftitaniumdioxidethinfilmsgrownbycathodicarcdeposition AT marqueza xrayreflectivityanalysisoftitaniumdioxidethinfilmsgrownbycathodicarcdeposition |
| _version_ |
1807316571289288704 |