Characterization of fabrication process of micropores on silicon substrate by electrochemical method

In the present work, the fabrication process of a set of micropores on crystalline silicon wafers manufactured through wet etching technique was studied. The influence of different control factors such as voltage, temperature and braking agent on the specific characteristics of formation was evaluat...

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Detalles Bibliográficos
Autores principales: Der, M., Olmos, C., Rosero, G., Santizo, I., Fernandez, T., Dieguez, M., Sacco, F., Granell, P., Golmar, F., Lerner, B., Lasorsa, C., Perez, M.
Formato: JOUR
Materias:
Biological sensors
Macropores
Silicon
Wet etching
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_15177076_v23_n2_p_Der
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

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