Characterization of fabrication process of micropores on silicon substrate by electrochemical method
In the present work, the fabrication process of a set of micropores on crystalline silicon wafers manufactured through wet etching technique was studied. The influence of different control factors such as voltage, temperature and braking agent on the specific characteristics of formation was evaluat...
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| Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_15177076_v23_n2_p_Der |
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todo:paper_15177076_v23_n2_p_Der2023-10-03T16:19:51Z Characterization of fabrication process of micropores on silicon substrate by electrochemical method Der, M. Olmos, C. Rosero, G. Santizo, I. Fernandez, T. Dieguez, M. Sacco, F. Granell, P. Golmar, F. Lerner, B. Lasorsa, C. Perez, M. Biological sensors Macropores Silicon Wet etching In the present work, the fabrication process of a set of micropores on crystalline silicon wafers manufactured through wet etching technique was studied. The influence of different control factors such as voltage, temperature and braking agent on the specific characteristics of formation was evaluated. An exhaustive analysis of the evolution of electric currents during the fabrication made possible to standardize the process and determine the pore-formation time, essential feature considering the exigent requirements of industry. Finally, it was concluded that optimum conditions for a controlled fabrication of pores correspond to a temperature of 84 °C, HCl as a braking agent and voltages of 0,1V, 0,5V and 1V respectively. The above results are of great importance in different fields, such as biology or medicine, in relation to the utility of pores as sensing devices. © 2018, Universidade Federal do Rio de Janeiro. All rights reserved. JOUR info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_15177076_v23_n2_p_Der |
| institution |
Universidad de Buenos Aires |
| institution_str |
I-28 |
| repository_str |
R-134 |
| collection |
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) |
| topic |
Biological sensors Macropores Silicon Wet etching |
| spellingShingle |
Biological sensors Macropores Silicon Wet etching Der, M. Olmos, C. Rosero, G. Santizo, I. Fernandez, T. Dieguez, M. Sacco, F. Granell, P. Golmar, F. Lerner, B. Lasorsa, C. Perez, M. Characterization of fabrication process of micropores on silicon substrate by electrochemical method |
| topic_facet |
Biological sensors Macropores Silicon Wet etching |
| description |
In the present work, the fabrication process of a set of micropores on crystalline silicon wafers manufactured through wet etching technique was studied. The influence of different control factors such as voltage, temperature and braking agent on the specific characteristics of formation was evaluated. An exhaustive analysis of the evolution of electric currents during the fabrication made possible to standardize the process and determine the pore-formation time, essential feature considering the exigent requirements of industry. Finally, it was concluded that optimum conditions for a controlled fabrication of pores correspond to a temperature of 84 °C, HCl as a braking agent and voltages of 0,1V, 0,5V and 1V respectively. The above results are of great importance in different fields, such as biology or medicine, in relation to the utility of pores as sensing devices. © 2018, Universidade Federal do Rio de Janeiro. All rights reserved. |
| format |
JOUR |
| author |
Der, M. Olmos, C. Rosero, G. Santizo, I. Fernandez, T. Dieguez, M. Sacco, F. Granell, P. Golmar, F. Lerner, B. Lasorsa, C. Perez, M. |
| author_facet |
Der, M. Olmos, C. Rosero, G. Santizo, I. Fernandez, T. Dieguez, M. Sacco, F. Granell, P. Golmar, F. Lerner, B. Lasorsa, C. Perez, M. |
| author_sort |
Der, M. |
| title |
Characterization of fabrication process of micropores on silicon substrate by electrochemical method |
| title_short |
Characterization of fabrication process of micropores on silicon substrate by electrochemical method |
| title_full |
Characterization of fabrication process of micropores on silicon substrate by electrochemical method |
| title_fullStr |
Characterization of fabrication process of micropores on silicon substrate by electrochemical method |
| title_full_unstemmed |
Characterization of fabrication process of micropores on silicon substrate by electrochemical method |
| title_sort |
characterization of fabrication process of micropores on silicon substrate by electrochemical method |
| url |
http://hdl.handle.net/20.500.12110/paper_15177076_v23_n2_p_Der |
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