Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter

In vacuum arcs of interest for film deposition the ion kinetic energy is of importance because it influences the coating properties. In this kind of discharge, the ions come out from the cathode spots with a high kinetic energy (20-150 eV). In the present work, we present measurements of vacuum arc...

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Detalles Bibliográficos
Autores principales: Giuliani, L., Grondona, D., Kelly, H., Minotti, F.
Formato: CONF
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Acceso en línea:http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Giuliani
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