Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter

In vacuum arcs of interest for film deposition the ion kinetic energy is of importance because it influences the coating properties. In this kind of discharge, the ions come out from the cathode spots with a high kinetic energy (20-150 eV). In the present work, we present measurements of vacuum arc...

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Autores principales: Giuliani, L., Grondona, D., Kelly, H., Minotti, F.
Formato: CONF
Materias:
Axial positions
Cathode spot
Coating properties
Film deposition
Floating potentials
In-vacuum
Ion energy distributions
Ion kinetic energy
Magnetic field strengths
Pulsed vacuum arc
Vacuum arcs
Cavity resonators
Electric discharges
Electric power distribution
Electron energy loss spectroscopy
Kinetic energy
Magnetic fields
Magnetic filters
Magnetic separators
Vacuum
Vacuum deposition
Vacuum technology
Ions
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Giuliani
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id todo:paper_02811847_vT131_n_p_Giuliani
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spelling todo:paper_02811847_vT131_n_p_Giuliani2023-10-03T15:17:10Z Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter Giuliani, L. Grondona, D. Kelly, H. Minotti, F. Axial positions Cathode spot Coating properties Film deposition Floating potentials In-vacuum Ion energy distributions Ion kinetic energy Magnetic field strengths Pulsed vacuum arc Vacuum arcs Cavity resonators Electric discharges Electric power distribution Electron energy loss spectroscopy Kinetic energy Magnetic fields Magnetic filters Magnetic separators Vacuum Vacuum deposition Vacuum technology Ions In vacuum arcs of interest for film deposition the ion kinetic energy is of importance because it influences the coating properties. In this kind of discharge, the ions come out from the cathode spots with a high kinetic energy (20-150 eV). In the present work, we present measurements of vacuum arc ion energy distributions in a pulsed vacuum arc with a straight magnetic filter. A retarding field analyser (RFA) was used to perform the measurements that were carried out with a variable magnetic field strength (of the order of 10 mT). Since the interpretation of the results obtained from the RFA lies in the knowledge of the plasma and floating potential values, we have employed also Langmuir probes for determining those quantities. The obtained results for the ion kinetic energy are similar to those reported by other authors, but they were also found to be independent of the magnetic field strength. The electron temperature was also found to be independent of the magnetic field strength and of the axial position along the filter, indicating the absence of collisions. © 2008 The Royal Swedish Academy of Sciences. CONF info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Giuliani
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic Axial positions
Cathode spot
Coating properties
Film deposition
Floating potentials
In-vacuum
Ion energy distributions
Ion kinetic energy
Magnetic field strengths
Pulsed vacuum arc
Vacuum arcs
Cavity resonators
Electric discharges
Electric power distribution
Electron energy loss spectroscopy
Kinetic energy
Magnetic fields
Magnetic filters
Magnetic separators
Vacuum
Vacuum deposition
Vacuum technology
Ions
spellingShingle Axial positions
Cathode spot
Coating properties
Film deposition
Floating potentials
In-vacuum
Ion energy distributions
Ion kinetic energy
Magnetic field strengths
Pulsed vacuum arc
Vacuum arcs
Cavity resonators
Electric discharges
Electric power distribution
Electron energy loss spectroscopy
Kinetic energy
Magnetic fields
Magnetic filters
Magnetic separators
Vacuum
Vacuum deposition
Vacuum technology
Ions
Giuliani, L.
Grondona, D.
Kelly, H.
Minotti, F.
Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter
topic_facet Axial positions
Cathode spot
Coating properties
Film deposition
Floating potentials
In-vacuum
Ion energy distributions
Ion kinetic energy
Magnetic field strengths
Pulsed vacuum arc
Vacuum arcs
Cavity resonators
Electric discharges
Electric power distribution
Electron energy loss spectroscopy
Kinetic energy
Magnetic fields
Magnetic filters
Magnetic separators
Vacuum
Vacuum deposition
Vacuum technology
Ions
description In vacuum arcs of interest for film deposition the ion kinetic energy is of importance because it influences the coating properties. In this kind of discharge, the ions come out from the cathode spots with a high kinetic energy (20-150 eV). In the present work, we present measurements of vacuum arc ion energy distributions in a pulsed vacuum arc with a straight magnetic filter. A retarding field analyser (RFA) was used to perform the measurements that were carried out with a variable magnetic field strength (of the order of 10 mT). Since the interpretation of the results obtained from the RFA lies in the knowledge of the plasma and floating potential values, we have employed also Langmuir probes for determining those quantities. The obtained results for the ion kinetic energy are similar to those reported by other authors, but they were also found to be independent of the magnetic field strength. The electron temperature was also found to be independent of the magnetic field strength and of the axial position along the filter, indicating the absence of collisions. © 2008 The Royal Swedish Academy of Sciences.
format CONF
author Giuliani, L.
Grondona, D.
Kelly, H.
Minotti, F.
author_facet Giuliani, L.
Grondona, D.
Kelly, H.
Minotti, F.
author_sort Giuliani, L.
title Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter
title_short Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter
title_full Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter
title_fullStr Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter
title_full_unstemmed Ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter
title_sort ion kinetic energy distribution in a pulsed vacuum arc with a straight magnetic filter
url http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Giuliani
work_keys_str_mv AT giulianil ionkineticenergydistributioninapulsedvacuumarcwithastraightmagneticfilter
AT grondonad ionkineticenergydistributioninapulsedvacuumarcwithastraightmagneticfilter
AT kellyh ionkineticenergydistributioninapulsedvacuumarcwithastraightmagneticfilter
AT minottif ionkineticenergydistributioninapulsedvacuumarcwithastraightmagneticfilter
_version_ 1807316347760148480

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