On the use of cross-polarization measurements in the detection of grating asymmetries

The differences in the curves of the zeroth order cross-polarization reflection coefficients (p → s and s → p) versus angle of incidence have remarkable potential for application in scatterometry since, if larger than the measurement error, could allow for a reliable nondestructive technique to dete...

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Autores principales: Depine, R.A., Kaufmann G.H.
Formato: CONF
Materias:
Characterization techniques
Elipsometry
Gratings
Scatterometry
Computer simulation
Ellipsometry
Error analysis
Light polarization
Light reflection
Light scattering
Cross-polarization asymmetries
Grating asymmetries
Diffraction gratings
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_0277786X_v4419_n_p773_Depine
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id todo:paper_0277786X_v4419_n_p773_Depine
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spelling todo:paper_0277786X_v4419_n_p773_Depine2023-10-03T15:16:20Z On the use of cross-polarization measurements in the detection of grating asymmetries Depine, R.A. Kaufmann G.H. Characterization techniques Elipsometry Gratings Scatterometry Computer simulation Ellipsometry Error analysis Light polarization Light reflection Light scattering Cross-polarization asymmetries Grating asymmetries Diffraction gratings The differences in the curves of the zeroth order cross-polarization reflection coefficients (p → s and s → p) versus angle of incidence have remarkable potential for application in scatterometry since, if larger than the measurement error, could allow for a reliable nondestructive technique to detect asymmetries in grating profiles. In this paper the cross-polarization efficiencies of metallic gratings with asymmetric grooves are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p → s and s → p conversion efficiencies tend to be undetectable for highly conducting materials, limiting, in principle, the application of this potential detection technique. CONF info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_0277786X_v4419_n_p773_Depine
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic Characterization techniques
Elipsometry
Gratings
Scatterometry
Computer simulation
Ellipsometry
Error analysis
Light polarization
Light reflection
Light scattering
Cross-polarization asymmetries
Grating asymmetries
Diffraction gratings
spellingShingle Characterization techniques
Elipsometry
Gratings
Scatterometry
Computer simulation
Ellipsometry
Error analysis
Light polarization
Light reflection
Light scattering
Cross-polarization asymmetries
Grating asymmetries
Diffraction gratings
Depine, R.A.
Kaufmann G.H.
On the use of cross-polarization measurements in the detection of grating asymmetries
topic_facet Characterization techniques
Elipsometry
Gratings
Scatterometry
Computer simulation
Ellipsometry
Error analysis
Light polarization
Light reflection
Light scattering
Cross-polarization asymmetries
Grating asymmetries
Diffraction gratings
description The differences in the curves of the zeroth order cross-polarization reflection coefficients (p → s and s → p) versus angle of incidence have remarkable potential for application in scatterometry since, if larger than the measurement error, could allow for a reliable nondestructive technique to detect asymmetries in grating profiles. In this paper the cross-polarization efficiencies of metallic gratings with asymmetric grooves are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p → s and s → p conversion efficiencies tend to be undetectable for highly conducting materials, limiting, in principle, the application of this potential detection technique.
format CONF
author Depine, R.A.
Kaufmann G.H.
author_facet Depine, R.A.
Kaufmann G.H.
author_sort Depine, R.A.
title On the use of cross-polarization measurements in the detection of grating asymmetries
title_short On the use of cross-polarization measurements in the detection of grating asymmetries
title_full On the use of cross-polarization measurements in the detection of grating asymmetries
title_fullStr On the use of cross-polarization measurements in the detection of grating asymmetries
title_full_unstemmed On the use of cross-polarization measurements in the detection of grating asymmetries
title_sort on the use of cross-polarization measurements in the detection of grating asymmetries
url http://hdl.handle.net/20.500.12110/paper_0277786X_v4419_n_p773_Depine
work_keys_str_mv AT depinera ontheuseofcrosspolarizationmeasurementsinthedetectionofgratingasymmetries
AT kaufmanngh ontheuseofcrosspolarizationmeasurementsinthedetectionofgratingasymmetries
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