Design of a phase shifting interferometer in the EUV for high precision metrology

Mostrar todas las versiones(3)

We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence o...

Descripción completa

Guardado en:
Detalles Bibliográficos
Autores principales: Capeluto, M.G., Marconi, M.C., Iemmi, C.
Formato: Documento de conferencia publishedVersion
Lenguaje:Inglés
Publicado: 2011
Materias:
Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id paperaa:paper_17426588_v274_n1_p_Capeluto
record_format dspace
spelling paperaa:paper_17426588_v274_n1_p_Capeluto2023-06-12T16:51:02Z Design of a phase shifting interferometer in the EUV for high precision metrology J. Phys. Conf. Ser. 2011;274(1) Capeluto, M.G. Marconi, M.C. Iemmi, C. Argon lasers Extreme ultraviolet lithography Interferometers Pulsed lasers Ar-laser EUV lasers Extreme ultraviolets High-precision Ne-like Phase-shift interferometer Phase-shifting interferometers Table-top Phase shift We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront. Fil:Capeluto, M.G. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marconi, M.C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Iemmi, C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2011 info:eu-repo/semantics/conferenceObject info:ar-repo/semantics/documento de conferencia info:eu-repo/semantics/publishedVersion application/pdf eng info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
language Inglés
orig_language_str_mv eng
topic Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
spellingShingle Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
Capeluto, M.G.
Marconi, M.C.
Iemmi, C.
Design of a phase shifting interferometer in the EUV for high precision metrology
topic_facet Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
description We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.
format Documento de conferencia
Documento de conferencia
publishedVersion
author Capeluto, M.G.
Marconi, M.C.
Iemmi, C.
author_facet Capeluto, M.G.
Marconi, M.C.
Iemmi, C.
author_sort Capeluto, M.G.
title Design of a phase shifting interferometer in the EUV for high precision metrology
title_short Design of a phase shifting interferometer in the EUV for high precision metrology
title_full Design of a phase shifting interferometer in the EUV for high precision metrology
title_fullStr Design of a phase shifting interferometer in the EUV for high precision metrology
title_full_unstemmed Design of a phase shifting interferometer in the EUV for high precision metrology
title_sort design of a phase shifting interferometer in the euv for high precision metrology
publishDate 2011
url http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
work_keys_str_mv AT capelutomg designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology
AT marconimc designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology
AT iemmic designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology
_version_ 1769810300590096384

Ejemplares similares