Three-dimensional ion distribution in a filtered vacuum arc discharge

Mostrar todas las versiones(3)

Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic fiel...

Descripción completa

Guardado en:
Detalles Bibliográficos
Autores principales: Kelly, H., Marquez, A., Pirrera, M.
Formato: Artículo publishedVersion
Lenguaje:Inglés
Publicado: 2006
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id paperaa:paper_0094243X_v875_n_p254_Kelly
record_format dspace
spelling paperaa:paper_0094243X_v875_n_p254_Kelly2023-06-12T16:46:12Z Three-dimensional ion distribution in a filtered vacuum arc discharge AIP Conf. Proc. 2006;875:254-257 Kelly, H. Marquez, A. Pirrera, M. Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported. © 2006 American Institute of Physics. Fil:Kelly, H. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Pirrera, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2006 info:eu-repo/semantics/article info:ar-repo/semantics/artículo info:eu-repo/semantics/publishedVersion application/pdf eng info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
language Inglés
orig_language_str_mv eng
description Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported. © 2006 American Institute of Physics.
format Artículo
Artículo
publishedVersion
author Kelly, H.
Marquez, A.
Pirrera, M.
spellingShingle Kelly, H.
Marquez, A.
Pirrera, M.
Three-dimensional ion distribution in a filtered vacuum arc discharge
author_facet Kelly, H.
Marquez, A.
Pirrera, M.
author_sort Kelly, H.
title Three-dimensional ion distribution in a filtered vacuum arc discharge
title_short Three-dimensional ion distribution in a filtered vacuum arc discharge
title_full Three-dimensional ion distribution in a filtered vacuum arc discharge
title_fullStr Three-dimensional ion distribution in a filtered vacuum arc discharge
title_full_unstemmed Three-dimensional ion distribution in a filtered vacuum arc discharge
title_sort three-dimensional ion distribution in a filtered vacuum arc discharge
publishDate 2006
url http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
work_keys_str_mv AT kellyh threedimensionaliondistributioninafilteredvacuumarcdischarge
AT marqueza threedimensionaliondistributioninafilteredvacuumarcdischarge
AT pirreram threedimensionaliondistributioninafilteredvacuumarcdischarge
_version_ 1769810108802400256

Ejemplares similares