Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel

A method to obtain depth-resolved structural information from hydrogen-free amorphous carbon films of high roughness, high thickness and grown on unpolished substrates was developed. The characterization was based on combining secondary ion mass spectrometry (SIMS) sputtering for craters at defined...

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Autores principales:	Fazio, Mariana Andrea, Kleiman, Ariel Javier, Marquez, Adriana B.
Publicado:	2017
Materias:	Amorphous carbon Amorphous films Etching Mass spectrometry Raman spectroscopy Secondary ion mass spectrometry Stainless steel X ray photoelectron spectroscopy Amorphous carbon layer Depth-resolved Etching process Etching rate Raman measurements Structural information Visible Raman Spectroscopy XPS measurements Carbon films
Acceso en línea:	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_09259635_v74_n_p173_Fazio http://hdl.handle.net/20.500.12110/paper_09259635_v74_n_p173_Fazio
Aporte de:	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

id	paper:paper_09259635_v74_n_p173_Fazio
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spelling	paper:paper_09259635_v74_n_p173_Fazio2023-06-08T15:51:30Z Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel Fazio, Mariana Andrea Kleiman, Ariel Javier Marquez, Adriana B. Amorphous carbon Amorphous films Etching Mass spectrometry Raman spectroscopy Secondary ion mass spectrometry Stainless steel X ray photoelectron spectroscopy Amorphous carbon layer Depth-resolved Etching process Etching rate Raman measurements Structural information Visible Raman Spectroscopy XPS measurements Carbon films A method to obtain depth-resolved structural information from hydrogen-free amorphous carbon films of high roughness, high thickness and grown on unpolished substrates was developed. The characterization was based on combining secondary ion mass spectrometry (SIMS) sputtering for craters at defined depth with X-ray photoelectron spectroscopy (XPS) and visible Raman spectroscopy analysis. After determination of the etching rate for the carbon film, areas with a defined end position corresponding to different known depths of the films were obtained. The SIMS etching process used did not significantly affect the structure of the amorphous carbon layer. XPS measurements of the crater bottoms provided information about the composition of the films. Visible Raman spectroscopy measurements inside of the craters were correlated with the XPS results taking into account the penetration depths of both techniques, and models aimed at predicting the sp2/sp3 ratio from Raman measurements were evaluated. © 2017 Elsevier B.V. Fil:Fazio, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Kleiman, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Márquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2017 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_09259635_v74_n_p173_Fazio http://hdl.handle.net/20.500.12110/paper_09259635_v74_n_p173_Fazio
institution	Universidad de Buenos Aires
institution_str	I-28
repository_str	R-134
collection	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic	Amorphous carbon Amorphous films Etching Mass spectrometry Raman spectroscopy Secondary ion mass spectrometry Stainless steel X ray photoelectron spectroscopy Amorphous carbon layer Depth-resolved Etching process Etching rate Raman measurements Structural information Visible Raman Spectroscopy XPS measurements Carbon films
spellingShingle	Amorphous carbon Amorphous films Etching Mass spectrometry Raman spectroscopy Secondary ion mass spectrometry Stainless steel X ray photoelectron spectroscopy Amorphous carbon layer Depth-resolved Etching process Etching rate Raman measurements Structural information Visible Raman Spectroscopy XPS measurements Carbon films Fazio, Mariana Andrea Kleiman, Ariel Javier Marquez, Adriana B. Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel
topic_facet	Amorphous carbon Amorphous films Etching Mass spectrometry Raman spectroscopy Secondary ion mass spectrometry Stainless steel X ray photoelectron spectroscopy Amorphous carbon layer Depth-resolved Etching process Etching rate Raman measurements Structural information Visible Raman Spectroscopy XPS measurements Carbon films
description	A method to obtain depth-resolved structural information from hydrogen-free amorphous carbon films of high roughness, high thickness and grown on unpolished substrates was developed. The characterization was based on combining secondary ion mass spectrometry (SIMS) sputtering for craters at defined depth with X-ray photoelectron spectroscopy (XPS) and visible Raman spectroscopy analysis. After determination of the etching rate for the carbon film, areas with a defined end position corresponding to different known depths of the films were obtained. The SIMS etching process used did not significantly affect the structure of the amorphous carbon layer. XPS measurements of the crater bottoms provided information about the composition of the films. Visible Raman spectroscopy measurements inside of the craters were correlated with the XPS results taking into account the penetration depths of both techniques, and models aimed at predicting the sp2/sp3 ratio from Raman measurements were evaluated. © 2017 Elsevier B.V.
author	Fazio, Mariana Andrea Kleiman, Ariel Javier Marquez, Adriana B.
author_facet	Fazio, Mariana Andrea Kleiman, Ariel Javier Marquez, Adriana B.
author_sort	Fazio, Mariana Andrea
title	Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel
title_short	Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel
title_full	Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel
title_fullStr	Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel
title_full_unstemmed	Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel
title_sort	depth-resolved study of hydrogen-free amorphous carbon films on stainless steel
publishDate	2017
url	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_09259635_v74_n_p173_Fazio http://hdl.handle.net/20.500.12110/paper_09259635_v74_n_p173_Fazio
work_keys_str_mv	AT faziomarianaandrea depthresolvedstudyofhydrogenfreeamorphouscarbonfilmsonstainlesssteel AT kleimanarieljavier depthresolvedstudyofhydrogenfreeamorphouscarbonfilmsonstainlesssteel AT marquezadrianab depthresolvedstudyofhydrogenfreeamorphouscarbonfilmsonstainlesssteel
_version_	1768542847824297984

Depth-resolved study of hydrogen-free amorphous carbon films on stainless steel

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