Three-dimensional ion distribution in a filtered vacuum arc discharge

Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic fiel...

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Autores principales: Kelly, Héctor Juan, Marquez, Adriana B., Pirrera, Mónica Beatriz
Publicado: 2006
Acceso en línea:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_0094243X_v875_n_p254_Kelly
http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
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Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id paper:paper_0094243X_v875_n_p254_Kelly
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spelling paper:paper_0094243X_v875_n_p254_Kelly2023-06-08T15:09:20Z Three-dimensional ion distribution in a filtered vacuum arc discharge Kelly, Héctor Juan Marquez, Adriana B. Pirrera, Mónica Beatriz Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported. © 2006 American Institute of Physics. Fil:Kelly, H. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Pirrera, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2006 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_0094243X_v875_n_p254_Kelly http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
description Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported. © 2006 American Institute of Physics.
author Kelly, Héctor Juan
Marquez, Adriana B.
Pirrera, Mónica Beatriz
spellingShingle Kelly, Héctor Juan
Marquez, Adriana B.
Pirrera, Mónica Beatriz
Three-dimensional ion distribution in a filtered vacuum arc discharge
author_facet Kelly, Héctor Juan
Marquez, Adriana B.
Pirrera, Mónica Beatriz
author_sort Kelly, Héctor Juan
title Three-dimensional ion distribution in a filtered vacuum arc discharge
title_short Three-dimensional ion distribution in a filtered vacuum arc discharge
title_full Three-dimensional ion distribution in a filtered vacuum arc discharge
title_fullStr Three-dimensional ion distribution in a filtered vacuum arc discharge
title_full_unstemmed Three-dimensional ion distribution in a filtered vacuum arc discharge
title_sort three-dimensional ion distribution in a filtered vacuum arc discharge
publishDate 2006
url https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_0094243X_v875_n_p254_Kelly
http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
work_keys_str_mv AT kellyhectorjuan threedimensionaliondistributioninafilteredvacuumarcdischarge
AT marquezadrianab threedimensionaliondistributioninafilteredvacuumarcdischarge
AT pirreramonicabeatriz threedimensionaliondistributioninafilteredvacuumarcdischarge
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