Pattern preserving deposition: Experimental results and modeling
In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a...
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paper:paper_00036951_v87_n12_p1_Castez2023-06-08T14:24:41Z Pattern preserving deposition: Experimental results and modeling Solari, Hernán Gustavo Annealing Aspect ratio Copper Metals Substrates Surface chemistry Vapors Metal deposition Pattern preserving deposition Surface diffusion Deposition In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a mesoscopic 1+1 dimensional model including deposition flow (directed and isotropic), surface diffusion and shadowing effects that account for the experimental growth data. Moreover, simulations on post-deposition annealing, for high aspect-ratio patterns show departures from the predictions of the linear theory for surface diffusion. © 2005 American Institute of Physics. Fil:Solari, H.G. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2005 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_00036951_v87_n12_p1_Castez http://hdl.handle.net/20.500.12110/paper_00036951_v87_n12_p1_Castez |
| institution |
Universidad de Buenos Aires |
| institution_str |
I-28 |
| repository_str |
R-134 |
| collection |
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) |
| topic |
Annealing Aspect ratio Copper Metals Substrates Surface chemistry Vapors Metal deposition Pattern preserving deposition Surface diffusion Deposition |
| spellingShingle |
Annealing Aspect ratio Copper Metals Substrates Surface chemistry Vapors Metal deposition Pattern preserving deposition Surface diffusion Deposition Solari, Hernán Gustavo Pattern preserving deposition: Experimental results and modeling |
| topic_facet |
Annealing Aspect ratio Copper Metals Substrates Surface chemistry Vapors Metal deposition Pattern preserving deposition Surface diffusion Deposition |
| description |
In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a mesoscopic 1+1 dimensional model including deposition flow (directed and isotropic), surface diffusion and shadowing effects that account for the experimental growth data. Moreover, simulations on post-deposition annealing, for high aspect-ratio patterns show departures from the predictions of the linear theory for surface diffusion. © 2005 American Institute of Physics. |
| author |
Solari, Hernán Gustavo |
| author_facet |
Solari, Hernán Gustavo |
| author_sort |
Solari, Hernán Gustavo |
| title |
Pattern preserving deposition: Experimental results and modeling |
| title_short |
Pattern preserving deposition: Experimental results and modeling |
| title_full |
Pattern preserving deposition: Experimental results and modeling |
| title_fullStr |
Pattern preserving deposition: Experimental results and modeling |
| title_full_unstemmed |
Pattern preserving deposition: Experimental results and modeling |
| title_sort |
pattern preserving deposition: experimental results and modeling |
| publishDate |
2005 |
| url |
https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_00036951_v87_n12_p1_Castez http://hdl.handle.net/20.500.12110/paper_00036951_v87_n12_p1_Castez |
| work_keys_str_mv |
AT solarihernangustavo patternpreservingdepositionexperimentalresultsandmodeling |
| _version_ |
1768542483141099520 |