Three-dimensional ion distribution in a filtered vacuum arc discharge

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Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic fiel...

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Autores principales:	Kelly, H., Marquez, A., Pirrera, M.
Formato:	Artículo publishedVersion
Publicado:	2006
Acceso en línea:	http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=artiaex&d=paper_0094243X_v875_n_p254_Kelly_oai
Aporte de:	Repositorio Digital de la Universidad de Buenos Aires (UBA) de Universidad de Buenos Aires

id	I28-R145-paper_0094243X_v875_n_p254_Kelly_oai
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spelling	I28-R145-paper_0094243X_v875_n_p254_Kelly_oai2024-08-16 Kelly, H. Marquez, A. Pirrera, M. 2006 Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported. © 2006 American Institute of Physics. Fil:Kelly, H. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Pirrera, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. application/pdf http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar AIP Conf. Proc. 2006;875:254-257 Three-dimensional ion distribution in a filtered vacuum arc discharge info:eu-repo/semantics/article info:ar-repo/semantics/artículo info:eu-repo/semantics/publishedVersion https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=artiaex&d=paper_0094243X_v875_n_p254_Kelly_oai
institution	Universidad de Buenos Aires
institution_str	I-28
repository_str	R-145
collection	Repositorio Digital de la Universidad de Buenos Aires (UBA)
description	Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported. © 2006 American Institute of Physics.
format	Artículo Artículo publishedVersion
author	Kelly, H. Marquez, A. Pirrera, M.
spellingShingle	Kelly, H. Marquez, A. Pirrera, M. Three-dimensional ion distribution in a filtered vacuum arc discharge
author_facet	Kelly, H. Marquez, A. Pirrera, M.
author_sort	Kelly, H.
title	Three-dimensional ion distribution in a filtered vacuum arc discharge
title_short	Three-dimensional ion distribution in a filtered vacuum arc discharge
title_full	Three-dimensional ion distribution in a filtered vacuum arc discharge
title_fullStr	Three-dimensional ion distribution in a filtered vacuum arc discharge
title_full_unstemmed	Three-dimensional ion distribution in a filtered vacuum arc discharge
title_sort	three-dimensional ion distribution in a filtered vacuum arc discharge
publishDate	2006
url	http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=artiaex&d=paper_0094243X_v875_n_p254_Kelly_oai
work_keys_str_mv	AT kellyh threedimensionaliondistributioninafilteredvacuumarcdischarge AT marqueza threedimensionaliondistributioninafilteredvacuumarcdischarge AT pirreram threedimensionaliondistributioninafilteredvacuumarcdischarge
_version_	1809356989417914368

Three-dimensional ion distribution in a filtered vacuum arc discharge

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