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00874nab a22002897a 4500 |
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A0002815 |
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AR-OvUNE |
005 |
20180807210913.0 |
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060804n xx ||||| 00| 0 engd |
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|a 0018-9219
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040 |
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|a AR-OvUNE
|c AR-OvUNE
|
100 |
1 |
|
|a Brueck, S.R.J.
|9 17875
|
245 |
1 |
0 |
|a Optical and interferometric lithography.
|
260 |
2 |
|
|b Institute of Electrical and Electronics Engineers
|a New York, NY
|
300 |
|
|
|a p.1704-1721
|
650 |
|
4 |
|a LITOGRAFIA INTERFEROMETRICA
|9 26088
|
650 |
|
4 |
|a METAMATERIALES
|9 26418
|
650 |
|
4 |
|a NANOFLUIDICA
|9 26800
|
650 |
|
4 |
|a NANOFOTONICA
|9 26801
|
650 |
|
4 |
|a NANOMAGNETISMO
|9 26802
|
650 |
|
4 |
|a NANOTECNOLOGIA
|
773 |
0 |
|
|t Proceedings of the IEEE
|g v.93, no.10, oct.2005
|
942 |
|
|
|c AN
|2 udc
|
945 |
|
|
|c Registro migrado.
|a bcr
|b Nro. acceso original: A0002815
|
999 |
|
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|c 9251
|d 9251
|