Ions 4 Anodes 2 Axial magnetic field 2 Cathodes 2 Cathodic arc 2 Cavity resonators 2 Copper 2 Deposition rates 2 Electric arcs 2 Electric current measurement 2 Electron emission 2 Electrons 2 Glass substrates 2 Ion density 2 Ion emission 2 Ion emissions 2 Ion energies 2 Ion saturation current 2 Leakage (fluid) 2 Magnetic field effects 2 Magnetic field strength 2 Magnetization 2 Operation parameters 2 Oxygen 2 Oxygen ambient 2 Plasmas 2 Probes 2 Pulsed vacuum arc 2 Sticking coefficients 2 Titanium 2