Reactive ion etching Refractive index 4 Amine functional groups 2 Antibodies 2 Antibody-antigen interactions 2 Antigen-antibody binding 2 Antigens 2 Biosensors 2 Body fluids 2 Bovine serum albumins 2 Cylinders (shapes) 2 DNA 2 DNA hybridization 2 DNA molecules 2 DNA sensing 2 Deep reactive ion etching 2 Detection sensitivity 2 Diffraction 2 Diffraction and scattering 2 Electromagnetic wave reflection 2 Evanescent wave 2 Experiments 2 Far field 2 Fiberoptic probes 2 Functional groups 2 Geometrical parameters 2 Grating structures 2 Grating surface 2 Highly sensitive 2 Human serum albumins 2