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Cavity resonators
Ions
Probes
2
Arc power
1
Axial positions
1
Cathode spot
1
Cathodic arc
1
Coating properties
1
Deposition rates
1
Electric circuit
1
Electric current measurement
1
Electric discharges
1
Electric power distribution
1
Electron currents
1
Electron energy loss spectroscopy
1
Electron temperature
1
Film deposition
1
Floating potentials
1
Glass substrates
1
High energy densities
1
In-vacuum
1
Inverse slope
1
Ion currents
1
Ion density
1
Ion emissions
1
Ion energies
1
Ion energy distributions
1
Ion kinetic energy
1
Ion saturation current
1
Ion sheath
1
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1
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2
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3