Capeluto, M., Marconi, M., & Iemmi, C. Design of a phase shifting interferometer in the EUV for high precision metrology.
Cita Chicago Style (17a ed.)Capeluto, M.G, M.C Marconi, y C. Iemmi. Design of a Phase Shifting Interferometer in the EUV for High Precision Metrology.
Cita MLA (8a ed.)Capeluto, M.G, et al. Design of a Phase Shifting Interferometer in the EUV for High Precision Metrology.
Precaución: Estas citas no son 100% exactas.