Ion emission in a dc titanium cathodic arc operated with oxygen

The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measuremen...

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Detalles Bibliográficos
Autores principales: Kleiman, A., Márquez, A., Kelly, H.
Formato: CONF
Materias:
Cathodic arc
Glass substrates
Ion density
Ion emissions
Ion energies
Ion saturation current
Operation parameters
Oxygen ambient
Sticking coefficients
Working pressures
Cavity resonators
Deposition rates
Electric current measurement
Leakage (fluid)
Oxygen
Probes
Titanium
Ions
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

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