Note: Focus error detection device for thermal expansion-recovery microscopy (ThERM)

An innovative focus error detection method is presented that is only sensitive to surface curvature variations, canceling both thermoreflectance and photodefelection effects. The detection scheme consists of an astigmatic probe laser and a four-quadrant detector. Nonlinear curve fitting of the defoc...

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Detalles Bibliográficos
Autores principales:	Domené, E.A., Martínez, O.E.
Formato:	JOUR
Materias:	Axial resolutions Defocusing Detection device Detection methods Detection scheme Four-quadrant Lateral resolution Nonlinear curve fitting Probe laser Pump beams Surface curvatures Thermoreflectance Curve fitting Cutoff frequency Thermal expansion
Acceso en línea:	http://hdl.handle.net/20.500.12110/paper_00346748_v84_n1_p_Domene
Aporte de:	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

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